We are studying Photonic Integrated Circuits.　　　▷Japanese

MOVPE (Metal Organic Vapour Phase Epitaxy) is one of the crystal growth technique for the compound semiconductor materials. Metalorganic compounds are a class of chemical compounds that contain metals and organic ligands. Metalorganic is liquid or solid at the room temperature, vapoour pressure is high, stable supply as gas phase is possible by using a carrier gas such as H2 or N2. Metalorganic is decomposed by temperature and metal is isolated. By using this feature, epitaxial crystal growth is possible by using III-group and V-group metalorganic. In our laboratory, In, Ga, Al, As, P compound semiconductor materials are grown.